4. Optics: measuring and testing
  5. By polarized light examination
  6. With light attenuation

Seung Woo Shin

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Apparatus for growing single crystal silicon and method for...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Method for forming oxide film in semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Method for forming oxide film in semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Method of forming a charge storage electrode having a...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Method of forming oxynitride film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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