4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Seiko Instruments Inc

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Automatic focusing system for scanning electron microscope...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method of manufacturing electric device

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Including contaminant removal or mitigation
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