4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Seethambal S. Mani

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Process for fabricating a microelectromechanical structure

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Selective etchant for oxide sacrificial material in...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Tungsten coating for improved wear resistance and...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2076480

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