4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate

SCP Global Technologies Inc.

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Apparatus and method for single substrate processing

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Buffer storage system

Material or article handling – Plural – static structures for supporting discrete loads and... – Load-underlying members
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Compliant silicon wafer handling system

Supports: racks – Special article – Platelike
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Dump door

Cleaning and liquid contact with solids – Processes – With treating fluid motion
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Method and apparatus for washing and/or drying using a...

Cleaning and liquid contact with solids – Processes – With treating fluid motion
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