4. Etching a substrate: processes
  5. Forming or treating optical article

Scott R. Chegwidden

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Double-metal EUV mask absorber

Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate

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Dual-layer EUV mask absorber with trenches having opposing...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2815439

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