4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Scott D. Habermehl

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Poole-frenkel piezoconductive element and sensor

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Piezoelectric crystal testing
Reexamination Certificate

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Process for fabricating a microelectromechanical structure

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Use of silicon oxynitride as a sacrificial material for...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2071731

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