4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Scott C. Stovall

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Beam blanker driver system and method

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam exposure correction system and method

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electrostatic particle beam deflector

Coded data generation or conversion – Digital pattern reading type converter – Optical
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3031002

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