4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Satohiro Okayama

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Substrate processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Substrate processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Substrate processing device, substrate conveying device, and...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1711292

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