4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition

Sang J. Choi

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Automatic multimeter

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Plural ranges – scales or registration rates
Reexamination Certificate

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Burglar alarm

Communications: electrical – Condition responsive indicating system – Specific condition
Reexamination Certificate

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Centralized automatic energy control system

Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate

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Dual function solid state relay

Electricity: motive power systems – Plural – diverse or diversely controlled electric motors
Reexamination Certificate

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Etch-ending point measuring method for wet-etch process

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Profile ID: LFUS-PAI-P-552815

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