4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Sang In Yi

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Method to reduce gas-phase reactions in a PECVD process with...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Methods used in fabricating gates in integrated circuit...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2671825

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