4. Measuring and testing
  5. Vibration
  6. Resonance, frequency, or amplitude study

Sang-In Han

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Attenuated phase shift mask for extreme ultraviolet...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Membrane mask stress measurement apparatus and method therefor

Measuring and testing – Vibration – Resonance – frequency – or amplitude study
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Method of fabricating three dimensional gate structure using...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of forming a pattern on a semiconductor wafer using...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Reflective mask useful for transferring a pattern using...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Profile ID: LFUS-PAI-P-2554560

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