4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

S. R. MacArthur

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Apparatus and method for aligning a substrate on a support membe

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Method and apparatus for detecting an endpoint polishing layer b

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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