4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Rudi Wilhelm

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Reactor precoating for reduced stress and uniform CVD

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Vertical oven with a boat for the uniform treatment of wafers

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2080975

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