4. Radiant energy
  5. Ion generation
  6. Field ionization type

Ronald A. Capodilupo

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Ion beam monitoring in an ion implanter using an imaging device

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion beam monitoring in an ion implanter using an imaging device

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Toroidal filament for plasma generation

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2075779

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