4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Base supplied constituent

Roland Mader

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Device and method for thermally treating substrates

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Method and apparatus for the production of process gas that...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Method of oxidation of semiconductor wafers in a rapid thermal p

Coating processes – Coating by vapor – gas – or smoke – Base supplied constituent
Patent

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Profile ID: LFUS-PAI-P-1249165

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