Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified configuration
Inventor
active
Hybrid phase-shift mask
Hybrid phase-shift mask
Method for the formation of interconnects and landing pads havin
Method of patterning sub-0.25 lambda line features with high...
Method of patterning sub-0.25&lgr; line features with high...
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