4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Robert T. Rozbicki

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Anti-agglomeration of copper seed layers in integrated...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of cleansing vias in semiconductor wafer having metal...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Passivation of copper in dual damascene metalization

Metal treatment – Process of modifying or maintaining internal physical... – Carburizing or nitriding using externally supplied carbon or...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2153817

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