4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. By reaction with substrate

Robert McFadden

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Plasma nitridation for reduced leakage gate dielectric layers

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Plasma nitridation for reduced leakage gate dielectric layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2626521

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