4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Robert B. Herring

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Chemical vapor deposition wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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System and method for hydrogen-rich selective oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-241891

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