4. Electrolysis: processes, compositions used therein, and methods
  5. Electrolytic coating
  6. Involving measuring, analyzing, or testing

Richard W. Hurtubise

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Copper metallization of silicon wafers using insoluble anodes

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
Patent

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Electroplating chemistry for the CU filling of submicron...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1736923

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