4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Richard S. Ray

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Ion implanter in-situ mass spectrometer

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Isotopically-enriched boron-containing compounds, and...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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Method to reduce downtime while implanting GeF4

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2589111

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