4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Electron beam imaging

Richard L. Lozes

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Beam exposure writing strategy system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Border modification for proximity effect correction in...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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Electron beam column for writing shaped electron beams

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electron beam column for writing shaped electron beams

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electrostatic particle beam deflector

Coded data generation or conversion – Digital pattern reading type converter – Optical
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Profile ID: LFUS-PAI-P-2485995

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