4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Richard J. Huang

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Apparatus and method for manufacturing semiconductors using...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and method for manufacturing semiconductors using...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
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Apparatus and methods for uniform scan dispensing of spin-on...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Apparatus for manufacturing planar spin-on films

Coating apparatus – Program – cyclic – or time control
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Continuous barrier for interconnect structure formed in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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