4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Richard de Geus

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Apparatus for chemical mechanical polishing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Apparatus for chemical mechanical polishing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Disc transfer device

Handling: hand and hoist-line implements – Hand bars and hand barrows – Opposing jaws
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Etch rate monitor using collimated light and method of using sam

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Method for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-397694

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