4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Rennie Barber

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Cooling element for a semiconductor fabrication chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Cooling element for a semiconductor fabrication chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Laminate low K film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method to use a laser to perform the edge clean operation on...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-691103

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