4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Raymond M. Sicina

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Method for fabricating an ultra thin silicon on insulator

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate

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UHV horizontal hot wall cluster CVD/growth design

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Ultra thin silicon on insulator

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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