4. Measuring and testing
  5. Testing of apparatus

Ravi Mullapudi

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Automated substrate processing systems and methods

Measuring and testing – Testing of apparatus
Reexamination Certificate

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Automated substrate processing systems and methods

Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Reexamination Certificate

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Rotating pallet in sputtering system

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2049787

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