4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Raney Williams

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Multiple stage process for cleaning process chambers

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Sidewall polymer forming gas additives for etching processes

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2655341

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