4. Conveyors: fluid current
  5. Having means for maintaining load in suspension along flow path

Randall W. Peltola

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Semiconductor wafer transfer method and apparatus

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent

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Wafer handling system and method

Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate

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Water slide for transferring semiconductor wafers

Conveyors: fluid current – Having means for maintaining load in suspension along flow path
Patent

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Profile ID: LFUS-PAI-P-1153230

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