Compositions: ceramic
Ceramic compositions
Carbide or oxycarbide containing
Inventor
active
Ceramic comprising silicon carbide with controlled porosity
Electrostatic chuck and method for forming an electrostatic...
Electrostatic chucks with flat film electrode
High-purity low-resistivity electrostatic chucks
Intermediate for producing porous silicon carbide
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Profile ID: LFUS-PAI-P-614279