4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Ramaseshan Suryanarayanan Iyer

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Deposition of carbon and nitrogen doped poly silicon films,...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Methods for silicon oxide and oxynitride deposition using...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2692598

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