4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Ralf Heck

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Hollow cylindrical cathode sputtering target and process for...

Coating processes – Miscellaneous
Reexamination Certificate

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Hollow cylindrical cathode sputtering target and process for...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Process for producing a tube-shaped cathode sputtering target

Metal founding – Process – Shaping liquid metal against a forming surface
Reexamination Certificate

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Tube target

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2672152

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