4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Pravin Narawankar

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Sequential in-situ heating and deposition of halogen-doped...

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Sequential in-situ heating and deposition of halogen-doped...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2089272

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