4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Alignment marks

Pin-Ting Wang

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Alignment pattern and algorithm for photolithographic alignment

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Patent

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Method for patterning semiconductor devices on a silicon...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for patterning semiconductor devices on a silicon...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for patterning semiconductor devices with a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Overlay target pattern and algorithm for layer-to-layer overlay

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Profile ID: LFUS-PAI-P-1479206

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