4. Radiant energy
  5. Ion generation
  6. Field ionization type

Philip J. Ring

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In-situ cleaning of beam defining apertures in an ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implanter with contaminant collecting surface

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implanter with contaminant collecting surface

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Toroidal filament for plasma generation

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2075781

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