4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Peter Koidl

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Composite structure for electronic microsystems and method...

Semiconductor device manufacturing: process – Having diamond semiconductor component
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Diamond body

Heat exchange – Expansion and contraction relieving or absorbing means
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Plasma reactor

Coating apparatus – Gas or vapor deposition – With treating means
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Plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Profile ID: LFUS-PAI-P-169584

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