4. Measuring and testing
  5. By abrasion, milling, rubbing, or scuffing

Perry W. Sandstrom

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Testing system for dissipative mechanical phenomena

Measuring and testing – By abrasion – milling – rubbing – or scuffing
Patent

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Wall deposition thickness sensor for plasma processing chamber

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Profile ID: LFUS-PAI-P-1093315

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