4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Paul P. Tesch

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Electron beam system using multiple electron beams

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Multi-column FIB for nanofabrication applications

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Multi-source plasma focused ion beam system

Radiant energy – Ion generation – Field ionization type
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Shaped and low density focused ion beams

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-2710128

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