4. Semiconductor device manufacturing: process
  5. Radiation or energy treatment modifying properties of...

Paul D. Mumbauer

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Method and apparatus for uniform direct radiant heating in a...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Selective etching of oxides from substrates

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Vortex based CVD reactor

Coating processes – Coating by vapor – gas – or smoke
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Profile ID: LFUS-PAI-P-2451573

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