4. Radiant energy
  5. Radiant energy generation and sources
  6. With radiation modifying member

Paul A. Blackborow

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Inductively-driven light source for lithography

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Inductively-driven light source for microscopy

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Inductively-driven plasma light source

Electric lamp and discharge devices – With temperature modifier – Hollow electrode or lead
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3064725

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