4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Pang Lin

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Fabricating dielectric layer

Coating processes – Electrical product produced – Metallic compound coating
Reexamination Certificate

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SBTN ferroelectric thin film and method for producing same

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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SOG materials for spacer anodic bonding and method of...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2578316

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