4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. By reaction with substrate

NTT Electronics Technology Corporation

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SOI substrate and method of producing the same

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Patent

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SOI substrate and method of producing the same

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Patent

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