4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Novellus Systems Incorporated

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Method and apparatus for damping vibrations in a...

Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Reexamination Certificate

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Method of cleansing vias in semiconductor wafer having metal...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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