4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Norman Tam

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RTP process chamber pressure control

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Thermal reactor with improved gas flow distribution

Coating apparatus – With means to apply electrical and/or radiant energy to work... – Radiant heating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2754999

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