4. Optics: measuring and testing
  5. By polarized light examination
  6. With light attenuation

Noriyuki Miyahara

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Active focus detecting device with infrared source

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Focusing degree-detecting device with a reduction optical system

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
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Microscope

Patent

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Microscope apparatus for examining wafer

Patent

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Optical surface profile measuring device

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Profile ID: LFUS-PAI-P-666551

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