4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Nobuaki Shigematsu

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Method for forming doped polysilicon films

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Silicon nitride film formation method

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1590965

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