4. Radiant energy
  5. Irradiation of objects or material
  6. Ion or electron beam irradiation

Nicolaas Franciscus Koppelaars

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Gas flushing system for use in lithographic apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Lithographic apparatus having a gas flushing device

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2853086

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