4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Neal T. Murphy

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Application of an ozonated DI water spray to resist residue...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Application of ozonated DI water to scrubbers for resist...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Ozonated DI water process for organic residue and metal...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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System and method for controlling a vapor dryer process

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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System and method for controlling a vapor dryer process

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2491120

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