4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Naoyuki Kajita

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Failure determining apparatus of gas-insulated electrical...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location
Reexamination Certificate

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Thin film-forming apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1597494

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