4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Naoaki Aizaki

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Charged-beam exposure system and charged-beam exposure method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Electron beam exposure apparatus with non-orthogonal electron em

Electric lamp and discharge devices: systems – Plural power supplies – Plural cathode and/or anode load device
Patent

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Sample table for pattern exposure machine

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1046713

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